| Chiller | ||||
| Model | YSL-C01 | YSL-C02 | YSL-C03 | YSL-C04 | 
| Tank capacity (L) | 20 | 40 | 60 | 80 | 
| Flow rate (3bar, L/min) | 10 | 20 | 30 | 40 | 
| Matching dicing system | DS1000 / 1SET | DS1000 / 2SET | DS1000 / 4SET | DS1000 /6SET | 
| AD2000/1SET | AD2000/2SET | AD2000/3SET | ||
| Temperature to be set | 15 ~ 30°C | |||
| Dimensions (WxDxH mm) | 700 X 770 X 1120 | 800 X 860 X 1320 | ||
| Machine’s weight(KG) | 280 | 350 | ||
| Power supply | 3P , 220V (50 ~ 60 Hz),5A | |||
 	 
  
| Tape Mounter | |
| Trial product size | 6 ~ 12 Inch | 
| Thickness | 150 ~ 800μm | 
| Blue film/UV tape | |
| UV tape size | Width≤300mm, Diameter≤200mm, Thickness 0.05~ 0.2mm | 
| Power supply | AC 220 50~60Hz 5A | 
| Machine power | 400W | 
| Air Pressure | ≥0.5Mpa | 
| Dimensions (W×D×H mm) | 700×910×610 | 
| Machine’s weight(KG) | 60 | 
 	 
  
| Spin Cleaner | |
| Trial product size | 3~12 Inch | 
| Cleaning pressure | 2.0~8.5 Mpa | 
| Spindle speed | 600~3000 rpm | 
| Cleaning / drying time setting | 3~2000 S | 
| Man-machine interface | 5.7 Inch | 
| Component replacement time | <15 min | 
| Dimensions (WxDxH mm) | 500 x 900 x 1250 | 
| Power supply | AC 220 50~60Hz | 
| Air Pressure | ≥0.6Mpa | 
| optional equipment | Hot D.I Water ( 0~80℃ ) | 
 	 
  
| UV Irradiator | |
| Trial product size | 6 ~ 12 Inch | 
| Air | 3 kg/cm2 | 
| Gas flow | 1 L/min (Adjustable) | 
| UV lamp | UV-A | 
| Wavelength | 352 nm | 
| Lamp life | 3000 Hr | 
| Power supply | AC220 50 ~ 60 Hz | 
| Dimensions(WxDxH mm) | 520 x 650 x 300 | 
| Machine’s weight(KG) | 32 | 
 	 
  
 	 
  
